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    Model H94-17G Single-side Mask Aligner

    Update: 2015/2/9      View:
    • Brand:    SVC
    • Type:    H94-17G
    • Price:     RMB
    • Promotion:     RMB ( 0 Customers Bought)
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    Introduction
     

    Main Application

    This machine is used to develop and manufacture medium and small-scale integrated circuits,semiconductor devices, photoelectronic device and sonic surface components.

    Main Structure

    It consists of high degree of accuracy aligning worktable, binocular field-spitting microscope (or CCD micrographic display system), phtotohead, pneumatic system, vacuum pipeline system, monoblock vacuum pump, vibration- resistance worktable and accessories case, etc..


    Main Functional Characteristics

    1.Wide Application
    It is used to photo-etch all kinds of substrates with iameter below 100mm and thickness below 5mm, including noncircular bstrates.

    2.Advanced Structure
    Air float levelling mechanism; Vacuum seal mechanism which realizes vacuum hard-contact, soft-contact and small-force contact; Vacuum mask frame and vacuum slide sucker.

    3.Handy Manipulation
    It fetches and places the substrate by turning over the plate. By pressing the buttons, it realizes vacuum sorption of mask, substrate, floating ball,and scan lock. It’s very simple and convenient to manipulate, debug
    ,maintain and repair.

    4.High Reliability
    It adopts imported electromagnetic valve, button and timer. With unique pneumatic system, vacuum pipeline system and precision machining of parts, the system equips with high reliability.

    5.Special Function of Processing Fragments
    It solves the problem that mask and substrate can’t be aligned because of adhesion between them, which is caused by noncircular substrates, fragments and uneven bottom surface of substrates.


    Main specifications

    Finest Exposure line: 1.5μm
    Alignment Precision: 1μm
    Mode of Fixing the mask and substrate: vacuum sorption
    Micropositioner Maximum Shift
    Range X,Y: ±4mm
    Micropositioner Scan Range
    X,Y:±20mm

    Maximum Swing Angle of load
    Bearing Platform: 90°
    Maximum Height of Elevating: 5mm
    Parallel and Uniform Source of light Diameter of Outgoing lightbeam:115mm
    Non-parallelism of light:
    ≤±6°
    Ununiformityof light:
    ≤±5%
    200-watt Mercury lamp started by
    directcurrent, fan-cooling
    BinocularField-spitting Microscope
    ( or CCD micrographic display system)MagnificationTimes:
    30×-375×
    DoubleObjective lens Distance:

    20-69mm
    Power:
    Compressedair:
    3.5kg
    Voltage:AC220V/50Hz
    Power:1000W
    OverallDimensions:
    918×680×1300(L×W×H)

    Weight:160kg





    Vacuum sorption framework


    X,Y Scan Structure
    Air-float levelling mechanism

     

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